Fabrication and characterization of low-loss polymeric waveguides and micro-resonators

J. Scheuer; A. Yariv

doi:10.2971/jeos.2006.06007

Journal of the European Optical Society - Rapid publications, Vol 1 (2006)

Fabrication and characterization of low-loss polymeric waveguides and micro-resonators

J. Scheuer, A. Yariv

Abstract

We realize low loss, single-mode polymer waveguides and microring resonators in SU-8 (MichroChem) using direct E-beam lithography. We also present and demonstrate a novel and simple approach for accurately extracting the propagation loss in the waveguides as well as the coupling between the waveguide and the microring. The demonstrated approach is insensitive to the I/O coupling efficiency to the optical chip and does not require any pre-calibration of the experimental setup.

Full Text: PDF

Citation Details

Cite this article

References

H. Ma, A. K.-Y. Jen and L. Dalton, Advanced Materials 14, 1339 (2002).

J. Scheuer, G. T. Paloczi and A. Yariv, Appl. Phys. Lett. 87, 251102 (2005).

C. Zhang, L. R. Dalton, M.-C. Oh, H. Zahng and W. H. Steir, Chem. Mater. 13, 3043 (2001).

G. T. Paloczi, Y. Huang and A. Yariv, Electron. lett. 39, 1650 (2003).

U. Levy, K. Campbell, A. Groisman, S. Mookherjea and Y. Fainman, Appl. Phys. Lett. 88, 111107 (2006).

B. L. Booth, J. Lightwave Technol. 7, 1445 (1989).

A. Neyer, T. Knoche and L. Muller, Electron. Lett. 29, 399 (1993).

J.-W. Kang, J.-J. Kim, J. Kim, X. Li, and M.-H. Lee, IEEE Photon. Technol. Lett. 14, 1297 (2002).

A. Yeniay, R. Gao, K. Takayama, R. Gao, and A. F. Garito, J. Lightwave Technol. 22, 154 (2004).

N. Yurt, K. Mune, R. Naito, T. Fukuoka, A. Mochizuki, K. Matsumoto, G. Meredith, N. Peyghambarian, and G. E. Jabbour, J. Lightwave Technol. 23, 1291 (2005).

J.-W. Kang, J.-P. Kim, J.-S. Lee, and J.-J. Kim, J. Lightwave Technol. 23, 364 (2005).

C. K. Madsen and J. H. Zhao, Optical Filter Design and Analysis: A Signal Processing Approach (Wiley-Interscience Publications, New- York, 1999).

A. Yariv, IEEE Photon. Technol. Lett. 14, 483 (2002).

E. A. J. Marcatili, AT & T Tech. J. 48, 2103 (1969).

D. Rafizadeh, J. P. Zhang, R. C. Tiberio, and S. T. Ho, J. Lightwave Technol. 16, 1308 (1998).

M. Aktary, M. O. Jensen, K. L. Westra, M. J. Brett, M. R. Freeman, J. Vac. Sci. Technol. B. 21, L5 (2003).