Design and fabrication of an all-dielectric grating with top-hat high diffraction efficiency over a broad spectral range

N. Lyndin; M. Flury; S. Tonchev; R. Fechner; O. Parriaux

doi:10.2971/jeos.2007.07019

Journal of the European Optical Society - Rapid publications, Vol 2 (2007)

Design and fabrication of an all-dielectric grating with top-hat high diffraction efficiency over a broad spectral range

N. Lyndin, M. Flury, S. Tonchev, R. Fechner, O. Parriaux

Abstract

Between 98% and 100% flat top efficiency â€“1st order TE diffraction over a 40 nm wavelength range centered at 800 nm can be obtained by an all-dielectric grating structure where the corrugation is etched in a high index layer unlike in the state of the art. 98% maximum efficiency and a wide-band top-hat diffraction efficiency spectrum are demonstrated experimentally opening to high efficiency femtosecond pulse compression for high average power laser machining.

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References

D. Strickland and G. Mourou, "Compression of amplified chirped optical pulses" Opt. Commun. 56, 219-221 (1985).

A. Reichart, N. Blanchot, P. Y. Baures, H. Bercegol, B. Wattelier, J. P. Zou, C. Sauteret and J. Dijon, "CPA compression gratings with improved damage performance" Proc. SPIE 4347, 521-527 (2001).

R. D. Boyd, J. A. Britten, D. E. Decker, B. W. Shore, B. C. Stuart, M. D. Perry and Lifeng Li, "High-efficiency metallic diffraction gratings for laser applications" Appl. Optics 34, 1697-1706 (1995).

A. S. Svakhin, V. A. Sychugov and A. E. Tikhomirov, "Efficient diffraction elements for TE-polarized waves" Sov. Phys. Tech. Phys. 36, 1038-1040 (1991).

J. A. Britten, M. D. Perry, B. W. Shore, R. D. Boyd, G. E. Loomis and R. Chow, "High efficiency dielectric multilayer gratings optimized for manufacturability and laser damage threshold" Proc. SPIE 2714, 511-520 (1996).

K. Hehl, J. Bischoff, U. Mohaupt, M. Palme, B. Schnabel, L. Wenke, R. Bödefeld, W. Theobald, E. Welsch, R. Sauerbrey and H. Heyer, "High-Efficiency Dielectric Reflection Gratings: Design, Fabrication, and Analysis" Appl. Optics 38, 6257-6271 (1999).

J. Néauport and N. Bonod, "Design, optimization and development of pulse compression gratings for the MPW-HE LIL" J. Phys. IV France 133, 669-672 (2006).

M. Flury, A. V. Tishchenko and O. Parriaux, "The leaky mode resonance condition ensures 100% diffraction efficiency of mirror based resonant gratings" IEEE J. Lightwave Technol. to be published, (July 2007).

B. Touzet and J. R. Gilchrist, "Multilayer dielectric gratings enable more powerful high energy lasers" Photon. spectra 68-75 (2005).

A. Ostendorf, T. Bauer, F. Korte, J. R. Howorth, C. Momma, N. H. Rizvi, F. Saviot, and F. Salin, "Development of an industrial femtosecond laser micromachining system" Proc. SPIE 4633, 128-135 (2002).

F. Canova, J. P. Chambaret, O. Uteza, P. Delaporte, M. Tondusson, E. Freysz, O. Parriaux, M. Flury, S. Tonchev and N. Lyndin, ">97% top-hat efficiency, >4 J/cm2 damage threshold compression gratings" Proc. ICUIL (Sept. 2006).

A. V. Tishchenko and V. A. Sychugov, "High grating efficiency by energy accumulation in a leaky mode" Opt. Quant. Electron. 32, 1027-1031 (2000).

A. S. Svakhin, V. A. Sychugov, A. E. Tikhomirov, "Diffraction gratings with high optical strength for laser resonators" Quantum Electron. 24, 233-235 (1994).

M. Abdou Ahmed, F. Pigeon, A. V. Tishchenko, O. Parriaux, Y. Ouerdane, S. Reynaud, J. C. Pommier and J. Fuchs, "Polarizing grating coupler for high Q laser cavities" IEEE J. Quantum. Elect. 39, 614- 619 (2003).

J. F. Bisson, O. Parriaux, N. Destouches, A. V. Tishchenko and K. Ueda, "99% diffraction efficiency leaky mode sustained resonant gratings and susceptibility to laser damage" Lasers and Electro- Optics, CLEO/Pacific Rim 2005, Tokyo, 435-436 (2005).

M. Foresti, L. Menez and A. V. Tishchenko, "Modal method in deep metal-dielectric gratings: the decisive role of hidden modes", J. Opt. Soc. Am. A 23, 2501-2509 (2006).

P. Lalanne and G. M. Morris, "Highly improved convergence of the coupled-wave method for TM polarization" J. Opt. Soc. Am. A 13, 779-784 (1996).

B. W. Shore, M. D. Perry, J. A. Britten, R. D. Boyd, M. D. Feit, H. T. Nguyen, R. Chow, G. E. Loomis and L. Li, "Design of highefficiency dielectric reflection gratings" J. Opt. Soc. Am. A 14, 1224- 1237 (1997).