Journal of the European Optical Society - Rapid publications, Vol 4 (2009)

Guided-wave photodetectors in germanium on optical chips in silicon-on-insulator

V. Sorianello, M. Balbi, L. Colace, G. Assanto, L. Socci, M. Romagnoli

Abstract


We report the integration of near-infrared waveguide photodetectors in polycrystalline Germanium with Silicon on Insulator optical chips for power monitor applications. We discuss design and fabrication of the devices as well as their characterization in terms of dark current, responsivity and signal to noise ratio.

© The Authors. All rights reserved. [DOI: 10.2971/jeos.2009.09030]

Full Text: PDF

Citation Details


Cite this article

References


M. Morse, "Germanium on silicon approaches III-V semiconductors in performance" Laser Focus World 43, 111-113 (2007).

T. Yin, R. Cohen, M. M. Morse, G. Sarid, Y. Chetrit, D. Rubin, and M. J. Paniccia, "31 GHz Ge n-i-p waveguide photodetectors on Silicon-on-Insulator substrate" Opt. Express 15, 13965 (2007).

D. Ahn, C. Hong, and J. Liu. et al., "High performance, waveguide integrated Ge photodetectors" Opt. Express 15, 3916 (2007).

L. Vivien, D. Marris-Morini, and J. M. Fédéli. et al., "Metalsemiconductor- metal Ge photodetectors integrated in silicon waveguides" Appl. Phys. Lett. 92, 151114 (2008).

G. Masini, V. Cencelli, L. Colace, F. de Notaristefani, and G. Assanto, "Monolithic integration of near-infrared Ge photodetectors with Si complementary metal-oxide-semiconductor readout electronics" Appl. Phys. Lett. 80, 3268 (2002).

L. Colace, G. Masini, V. Cencelli, F. de Notaristefani, and G. Assanto, "A near-infrared digital camera in polycrystalline germanium integrated on silicon" IEEE J. Quantum Elect. 43, 311 (2007).

G. Masini, G. Capellini, J. Witzen, and C. Gunn, "A 1550nm, 10Gb/s monolithic optical receiver in 130nm CMOS with integrated Ge waveguide photodetector" IEEE Intl. Conf. Group IV Photonics 1-3, (2007).

L. Colace, V. Sorianello, M. Balbi, and G. Assanto, "Germanium near infrared detector in silicon on insulator" Appl. Phys. Lett. 91, 021107 (2007).