3D-measurement with the stereo scanning electron microscope on sub-micrometer structures

T. Vynnyk; T. Schultheis; T. Fahlbusch; E. Reithmeier

doi:10.2971/jeos.2010.10038s

Journal of the European Optical Society - Rapid publications, Vol 5 (2010)

3D-measurement with the stereo scanning electron microscope on sub-micrometer structures

T. Vynnyk, T. Schultheis, T. Fahlbusch, E. Reithmeier

Abstract

In this paper the photometric or the so called "shape from shading" method is presented. In comparison to existing methods the efficiency of the detector system was considered and the requirements of the cosine Lambert's law for the angle distribution of the emitted electrons are suppressed. This new method was experimentally verified by measuring a steel sphere, a holographic grating and a hologram.

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