Diffractive shaping of excimer-laser beams for pulsed laser deposition

V. Kekkonen; A. Hakola; T. Kajava

doi:10.2971/jeos.2011.11013s

Journal of the European Optical Society - Rapid publications, Vol 6 (2011)

Diffractive shaping of excimer-laser beams for pulsed laser deposition

V. Kekkonen, A. Hakola, T. Kajava

Abstract

We present a beam-shaping system for a pulsed laser deposition setup. This system is based on two diffractive beam-splitter gratings and is able to produce 2*2-mm2 flat-top distributions of UV light with a fluence of 3 J/cm2 on the target some 30 cm behind the system. We have applied the setup to deposit ferromagnetic Ni-Mn-Ga films.

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