Journal of the European Optical Society - Rapid publications, Vol 7 (2012)
High NA diffractive array illuminators and application in a multi-spot scanning microscope
Abstract
© The Authors. All rights reserved. [DOI: 10.2971/jeos.2012.12026]
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References
A. W. Lohmann, "An array illuminator based on the Talbot effect," Optik 79, 41-45 (1988).
A. W. Lohmann, and J. A. Thomas, "Making an array illuminator based on the Talbot effect," Appl. Optics 29, 4337-4340 (1990).
T. Tanaami, S. Otsuki, N. Tomosada, Y. Kosugi, M. Shimizu, and H. Ishida, "High-Speed 1-Frame/ms Scanning Confocal Microscope with a Microlens and Nipkow Disks," Appl. Optics 41, 4704-4708 (2002).
R. F. M. Hendriks, A. Kastelijn, T. de Hoog, P. van der Walle, and A. Sternbro, "Optical card with parallel readout: Proposal for a new robust storage solution," Proc. SPIE 5380, 10-14 (2004).
J. R. Leger, and G. J. Swanson, "Efficient array illuminator using binary-optics phase plates at fractional-Talbot planes," Opt. Lett. 15, 288-290 (1990).
V. Arrizon, and J. Ojeda-Castaneda, "Talbot array illuminators with binary phase gratings," Opt. Lett. 18, 1-3 (1993).
T. J. Suleski, "Generation of Lohmann images from binary-phase Talbot array illuminators," Appl. Optics 36, 4686-4691 (1997).
P. Xi, C. Zhou, E. Dai, and L. Liu, "Generation of near-field hexagonal array illumination with a phase grating," Opt. Lett. 27, 228-230 (2002).
C. Siegel, F. Loewenthal, J. E. Balmer, and H. P. Weber, "Talbot array illuminator for single-shot measurements of laser-induced-damage thresholds of thin-film coatings," Appl. Optics 39, 1493-1499 (2000).
K.-H. Brenner, and R. Buschlinger, "Parallel image scanning with binary phase gratings," J. Europ. Opt. Soc. Rap. Public. 6, 11024 (2011).
L. P. Bakker, S. Stallinga, and C. Busch, "Binary phase structure for the generation of a periodic light signal," WIPO Patent 2006/035393 (2006).
J. H. Wayland, "A Contrast and resolution improvement in scanning microscopy - viewing sequential signals of light from scanned object, with sequential responses recorded for subsequent reproduction," United States Patent 4806004 (1989).
M. C. Krantz, "Optical system for scanning optical microscopes, has array detector to collect light from object in parallel detection channels for each light spot and construct image of particular field of object," United States Patent 6248988/B1 (1998).
H. Kusunose, "Optical scanner for defect inspection system, moves sample stage relative to light spot matrix array formed by objective lens so as to scan sample surface using two-dimensional spot array," United States Patent 2002/0162979/A (2002).
G. Almogy, and O. Reches, "Spot grid array imager for automated semiconductor wafer defect inspection, has laser for simultaneously radiating array of spots spaced apart from each other, on surface of semiconductor wafer," United States Patent 2003/0085335/A1 (2003).
D. Gräfe, M. Kühner, and F. Eismann, "Confocal laser scanning microscope has telescope lens system, followed by array of lenslets and lenses with a dichroitic beam splitter, followed by scanning mirrors and focusing lens system," WIPO Patent 2005/033767/A1 (2005).
L. P. Bakker, and R. F. M. Hendriks, "Method and system for scanning an information carrier via one-dimensional scanning," WIPO Patent 2007/043013/A2 (2007).
A. Barty, K. A. Nugent, D. Paganin, and A. Roberts, "Quantitative optical phase microscopy," Opt. Lett. 23, 817-819 (1998).
D. L. J. Vossen, L. P. Bakker, B. Hulsken, and S. Stallinga, "A method of imaging a sample", WIPO Patent 2009/022289 (2009).