Journal of the European Optical Society - Rapid publications, Vol 8 (2013)

Direct machining of curved trenches in silicon with femtosecond accelerating beams

A. Mathis, L. Froehly, L. Furfaro, M. Jacquot, J. M. Dudley, F. Courvoisier

Abstract


Control of the longitudinal profile of ablated structures during laser processing is a key technological requirement. We report here on the direct machining of trenches in silicon with circular profiles using femtosecond accelerating beams. We describe the ablation process based on an intensity threshold model, and show how the depth of the trenches can be predicted in the framework of a caustic description of the beam.

© The Authors. All rights reserved. [DOI: 10.2971/jeos.2013.13019]

Full Text: PDF

Citation Details


Cite this article

References


M. K. Bhuyan, F. Courvoisier, P. A. Lacourt, M. Jacquot, R. Salut, L. Furfaro, and J. M. Dudley, ”High aspect ratio nanochannel machining using single shot femtosecond Bessel beams,” Appl. Phys. Lett. 97, 081102 (2010).

M. K. Bhuyan, F. Courvoisier, P. A. Lacourt, M. Jacquot, L. Furfaro, M. J. Withford, and J. M. Dudley, ”High aspect ratio taper-free microchannel fabrication using femtosecond Bessel beams,” Opt. Express 18, 566–574 (2010).

G. A. Siviloglou, J. Broky, A. Dogariu, and D. N. Christodoulides, ”Observation of accelerating airy beams,” Phys. Rev. Lett. 99, 213901 (2007).

J. Baumgartl, M. Mazilu, and K. Dholakia, ”Optically mediated particle clearing using Airy wavepackets,” Nat. Photonics 2, 675–678 (2008).

P. Polynkin, M. Kolesik, J. V. Moloney, G. A. Siviloglou, and D. N. Christodoulides, ”Curved Plasma Channel Generation Using Ultraintense Airy Beams,” Science 324, 229–232 (2009).

I. Kaminer, R. Bekenstein, J. Nemirovsky, and M. Segev, ”Nondiffracting Accelerating Wave Packets of Maxwell’s Equations,” Phys. Rev. Lett. 108, 163901 (2012).

Y. Kaganovsky, and E. Heyman, ”Nonparaxial wave analysis of three-dimensional Airy beams,” J. Opt. Soc. Am. A 29, 671–688 (2012).

F. Courvoisier, A. Mathis, L. Froehly, R. Giust, L. Furfaro, P. A. Lacourt, M. Jacquot, and J. M. Dudley, ”Sending femtosecond pulses in circles: highly nonparaxial accelerating beams,” Opt. Lett. 37, 1736–1738 (2012).

M. Greenfield, E. Segev, W. Walasik, and O. Raz, ”Accelerating Light Beams along Arbitrary Convex Trajectories,” Phys. Rev. Lett. 106, 213902 (2011).

L. Froehly, F. Courvoisier, A. Mathis, M. Jacquot, L. Furfaro, R. Giust, P. A. Lacourt, and J. M. Dudley, ”Arbitrary accelerating micronscale caustic beams in two and three dimensions,” Opt. Express 19, 16455–16465 (2011).

P. Aleahmad, M. A. Miri, M. S. Mills, I. Kaminer, M. Segev, and D. N. Christodoulides, ”Fully Vectorial Accelerating Diffraction-Free Helmholtz Beams,” Phys. Rev. Lett. 109, 203902 (2012).

P. Zhang, Y. Hu, T. Li, D. Cannan, X. Yin, R. Morandotti, Z. Chen, and X. Zhang, ”Nonparaxial Mathieu and Weber Accelerating Beams,” Phys. Rev. Lett. 109, 193901 (2012).

M. A. Alonso, and M. A. Bandres, ”Spherical fields as nonparaxial accelerating waves,” Opt. Lett. 37(24), 5175–5177 (2012).

A. Mathis, F. Courvoisier, L. Froehly, L. Furfaro, M. Jacquot, P. A. Lacourt, and J. M. Dudley, ”Micromachining along a curve: Femtosecond laser micromachining of curved profiles in diamond and silicon using accelerating beams,” Appl. Phys. Lett. 101, 071110 (2012).

I. D. Chremmos, Z. Chen, D. N. Christodoulides, and N. K. Efremidis, ”Abruptly autofocusing and autodefocusing optical beams with arbitrary caustics,” Phys. Rev. A. 85, 023828 (2012).

F. Courvoisier, P. A. Lacourt, M. Jacquot, M. K. Bhuyan, L. Furfaro, and J. M. Dudley, ”Surface nanoprocessing with nondiffracting femtosecond Bessel beams,” Opt. Lett. 34, 3163–3165 (2009).

T. H. R. Crawford, A. Borowiec, and H. K. Haugen, ”Femtosecond laser micromachining of grooves in silicon with 800 nm pulses,” Appl. Phys. A 80, 1717–1724 (2005).

M. A. Bandres ”Accelerating beams,” Opt. Lett. 34(24), 3791–3793 (2009).


Journal of the European Optical Society:Rapid publications - ISSN 1990-2573. JEOS:RP is subject to the EOS General Terms and Conditions.