Journal of the European Optical Society - Rapid publications, Vol 8 (2013)

Correction of misalignment introduced aberration in non-null test measurements of free-form surfaces

G. Baer, J. Schindler, C. Pruss, W. Osten

Abstract


In interferometric testing of surfaces a major task is to avoid the introduction of aberrations due to misalignment of the surface under test. An automated method for the positioning of aspheric and free-form surfaces in a non-null test interferometer, as well as a method for the distinction between alignment introduced aberrations and surface errors is presented. A combination of both methods allows for a fully automated alignment with low requirements to the accuracy of the positioning stage. Further, the misalignment introduced uncertainties to the measurement are estimated. Simulation results as well as experimental results showing the feasibility of the method are presented.

© The Authors. All rights reserved. [DOI: 10.2971/jeos.2013.13074]

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References


B. Braunecker, R. Hentschel, and H. J. Tiziani (eds.), Advanced Optics Using Aspherical Elements (SPIE Press, Bellingham, 2008).

G. Schulz, ”Aspheric Surfaces,” in Progress in Optics, Vol. XXV, E. Wolf, ed., 349–415 (Elsevier Science Publishing, Amsterdam, 1988).

C. J. Evans, and J. B. Bryan, ”Compensation for errors introduced by nonzero fringe sensities in phase-measuring interferometers,” CIRP Ann-Manuf. Techn. 42, 577–580 (1993).

A. E. Lowman, and J. E. Greivenkamp, ”Interferometer errors due to the presence of fringes,” Appl. Optics 35, 6826–6828 (1996).

D. Malacara, K. Creath, J. Schmit, and C. Wyant, ”Testing of Aspheric Wavefronts and Surfaces,” in Optical Shop Testing, D. Malacara, ed., (3rd ed, John Wiley & Sons, Hoboken, 2007).

T. Yatagai, and H. Saito, ”Interferometric testing with computergenerated holograms: aberration balancing method and error analysis,” Appl. Optics 17, 558–565 (1978).

M. F. Kuechel, ”Absolute measurement of rotationally symmetric aspheric surfaces,” in Proceedings to Optical Fabrication and Testing (OFT), 1–3 (OSA, Rochester, 2006).

P. Murphy, G. Forbes, J. Fleig, P. Dumas, and M. Tricard, ”Stitching interferometry: a flexible solution for surface metrology,” Opt. Photonics News 14, 38–43 (2003).

M. Tricard, ”Subapertur-Stitching-Interferometrie: Messtechnik für die AsphärenPräzisionsfertigung,” Opt. Photonics News 6, 38–41 (2008) in German.

E. Garbusi, C. Pruss, and W. Osten, ”Interferometer for precise and exible asphere testing,” Opt. Lett. 33, 2973–2975 (2008).

G. C. Dente, ”Separating misalignment from misfigure in interferograms on off-axis aspheres,” in Proceedings to SPIE Precision Surface Metrology, 187–193 (SPIE, San Diego, 1983).

E. W. Young, and G. C. Dente, ”The effects of rigid body motion in interferometric tests of large-aperture, off-axis, aspheric optics,” in Proceedings to SPIE Southwest Conference on Optics, 59–68 (SPIE, Albuquerque, 1985).

B. Dörband, and H. J. Tiziani, ”Testing aspheric surfaces with computer-generated holograms: analysis of adjustment and shape errors,” Appl. Optics 24, 2604–2611 (1985).

G. Baer, E. Garbusi, W. Lyda, and W. Osten, ”Automated surface positioning for a non-null test interferometer,” Opt. Eng. 49, 095602-095602-12 (2010).

J. Liesner, E. Garbusi, C. Pruss, and W. Osten, ”Verfahren und Messvorrichtung zur Vermessung einer optisch glatten Oberfläche” Patent DE 10 2006 057 606 A1 (2006) in German.

J. Liesner, Zum Einsatz räumlicher Lichtmodulatoren in der interferometrischen Wellenfrontmesstechnik (Ph.D. thesis, Universität Stuttgart, 2006) in German.

E. Garbusi, and W. Osten, ”Perturbation methods in optics: application to the interferometric measurement of surfaces,” J. Opt. Soc. Am. A 26, 2538–2549 (2009).

G. Baer, J. Schindler, J. Siepmann, C. Pruss, W. Osten, and M. Schulz, ”Measurement of aspheres and free-form surfaces in a non-null test interferometer: reconstruction of high-frequency errors,” in Proceedings to SPIE 8788, Optical Measurement Systems for Industrial Inspection VIII, 10.1117/12.2021518 (SPIE, Munich, 2013).

K. Hornik, M. Stinchcombe, and H. White, ”Multilayer feedforward networks are universal approximators,” Neural Networks 2, 359–366 (1989).

M. T. Hagan, and M. B. Menhaj, ”Training Feedforward Networks with the Marquardt Algorithm,” IEEE T. Neural Networ. 5, 989–993 (1994).

J. Y. Wang, and D. E. Silva, ”Wave-front interpretation with Zernike polynomials,” Appl. Optics 19, 1510–1518 (1980).


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