Journal of the European Optical Society - Rapid publications, Vol 10 (2015)

Fourier ellipsometry – an ellipsometric approach to Fourier scatterometry

P. Petrik, N. Kumar, M. Fried, B. Fodor, G. Juhasz, S. F. Pereira, S. Burger, H. P. Urbach

Abstract


An extension of Fourier scatterometry is presented, aiming at increasing the sensitivity by measuring the phase difference between the reflections polarized parallel and perpendicular to the plane of incidence. The ellipsometric approach requires no additional hardware elements compared with conventional Fourier scatterometry. Furthermore, incoherent illumination is also sufficient, which enables spectroscopy using standard low-cost light sources.

© The Authors. All rights reserved. [DOI: 10.2971/jeos.2015.15002]

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