Journal of the European Optical Society - Rapid publications, Vol 11 (2016)

Polishing material removal correlation on PMMA – FEM simulation

R. Almeida, R. Börret, W. Rimkus, D. K. Harrison, A. K. M. DeSilva

Abstract


The complexity of polishing is very high and experience in this field is required to achieve reproducible deterministic results concerning shape accuracy. The goal of this work is to predict the material removal of the polishing process on PMMA (Polymethylmethacrylate) using an industrial robot polisher. In order to predict the material removal, a FEM Model was created representing the polishing process. This model will help to predict the material removal when polishing parameters are changed. Experiments were carried out and compared to the results obtained from the different parameters tested in the simulation.

© The Authors. All rights reserved. [DOI: 10.2971/jeos.2016.16012]

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References


S. Hwa, and R. Miller, Chemical Mechanical Polishing in Silicon Processing (Academic Press, San Diego, 1999).

J. Bliedtner, G. Gräfe, and R. Hector, Optical Technology (McGrawHill, New York, 2011).

E. Brinksmeier, O. Riemer, and A. Gessenharter, ”Finishing of structured surfaces by abrasive polishing,” Precis. Eng. 30, 325–336 (2006).

R. Boerret, A. Kelm, H. Thiess, and V. Giggel, ”ASPHERO5 - simulation and analysis of the aspherical polishing process,” Key Eng. Mat. 364, 488–492 (2008).

M. Speich, W. Rimkus, R. Börret, and D. K. Harrison, ”Materialabtrag beim Polieren - Finite Elemente Simulation und Versuch,” in Proceedings to 11th LS-Dyna Forum (DYNAmore, Ulm, 2012).

F. W. Preston, ”The Theory and Design of Plate Glass Polishing Machines,” Journal of the society of glass technology (1927).

R. Boerret, J. Raab, and M. Speich, ”Mould production for polymer optics,” Proc. SPIE 9192, 91921L (2014).